A charged particle beam generating device, a charged particle beam device, a high voltage generating device, and a high potential device

摘要

A charged particle beam-generating instrument according to the present invention is provided with: a charged particle source, a plurality of first-electrode-arranged charged particles along a charged-particle direction, a plurality of insulation elements disposed between the first electrodes, and a housing which is mounted around the plurality of first electrodes. The housing is made of an insulating solid material and has a plurality of second electrodes disposed at positions near the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the nearby one of the first electrodes.