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A device for firing a japanese periodical

机译:发行日本期刊的装置

摘要

A device for firing a japanese periodical, in a vacuum chamber (1) between the target (3) of a vacuum arc evaporator (2) and an electrode by means of an auxiliary plasma device, which has an ignition electrode (11), wherein said target (3) of the vacuum arc evaporator (2), is connected as a cathode, characterized in that– the auxiliary plasma device has a high voltage source (8),– the having an anodic high voltage electrode (10) can be connected,– that the ignition electrode (11) in the space between the target (3) and the high voltage electrode (10) is arranged,– that a capacitor (12) is provided, which in the direction of the ignition electrode (11) can be discharged, and– that the ignition electrode (11) as well as the high-voltage electrode (10) with a mess - and control device (9) for detecting and the regulation of the electrical parameters are contacted.
机译:一种通过辅助等离子体装置在真空电弧蒸发器(2)的靶(3)和电极之间的真空室(1)中烧制日本期刊的装置,该装置具有点火电极(11),其中所述真空电弧蒸发器(2)的靶(3)作为阴极连接,其特征在于:-辅助等离子体装置具有高压源(8),-具有阳极高压电极(10)可以连接,-在目标(3)和高压电极(10)之间的空间中布置了点火电极(11),-设置了一个朝点火电极(11)方向的电容器(12) )可以放电,并且–点火电极(11)以及带有杂物的高压电极(10)–与检测和调节电参数的控制装置(9)接触。

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