PROCESS FOR PERPENDICULAR ORIENTATION OF NANODOMAINES OF BLOCK COPOLYMERS USING STATISTICAL OR GRADIENT COPOLYMERS WHERE THE MONOMERS ARE AT LEAST DIFFERENT FROM THOSE PRESENT SPECIFICALLY IN EACH BLOCK OF BLOCK COPOLYMER

摘要

The present invention relates to a method of perpendicular orientation of nano-domains of block copolymers on a substrate by the use of a sub-layer of random or gradient copolymers whose monomers are at least partly different from those present respectively in each of the blocks of the block copolymer