首页> 外国专利> Transmitted wavefront measuring method, refractive-index distribution measuring method, method of manufacturing optical element, and transmitted wavefront measuring apparatus

Transmitted wavefront measuring method, refractive-index distribution measuring method, method of manufacturing optical element, and transmitted wavefront measuring apparatus

机译:透射波前测量方法,折射率分布测量方法,光学元件的制造方法以及透射波前测量设备

摘要

A transmitted wavefront measuring method comprises the steps of emitting light (101) from a light source (100) onto an object to be measured (120) to receive interfering light transmitted through the object and a diffraction grating (130) on a light receiving portion (140) disposed at a predetermined distance from the diffraction grating to measure an intensity distribution of the interfering light (T10), performing a Fourier transform of the intensity distribution to calculate a frequency distribution (T20), and obtaining a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distribution (T30 to T90). The step of obtaining the transmitted wavefront comprises the steps of performing an inverse Fourier transform of the primary frequency spectrum with reference to a grating frequency of the diffraction grating to calculate a complex amplitude of the interfering light (T60), and obtaining the transmitted wavefront based on the complex amplitude (T90).
机译:透射波前测量方法包括以下步骤:将来自光源(100)的光(101)发射到要测量的物体(120)上,以接收透射通过该物体的干涉光;以及在光接收部分上形成衍射光栅(130)。 (140)布置在距衍射光栅预定距离处以测量干涉光的强度分布(T10),对该强度分布进行傅立叶变换以计算频率分布(T20),并获得物体的透射波前基于频率分布中的主频谱(T30至T90)。获得透射波前的步骤包括以下步骤:参照衍射光栅的光栅频率对主频谱进行傅立叶逆变换,以计算出干涉光的复振幅(T60);以及复振幅(T90)。

著录项

  • 公开/公告号EP2233905A3

    专利类型

  • 公开/公告日2016-05-25

    原文格式PDF

  • 申请/专利权人 CANON KABUSHIKI KAISHA;

    申请/专利号EP20100156669

  • 发明设计人 KATO SEIMA;

    申请日2010-03-16

  • 分类号G01M11/02;G01N21/41;

  • 国家 EP

  • 入库时间 2022-08-21 14:52:49

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