ALUMINIUM DOPANT COMPOSITIONS, SUB-ATMOSPHERIC STORAGE AND DELIVERY PACKAGE CONTAINING SUCH COMPOSITIONS, AND METHOD OF STORING AND DELIVERING SUCH COMPOSITIONS

摘要

A novel method and system for using aluminum dopant compositions is provided. A composition of the aluminum dopant compositions is selected with sufficient vapor pressure and minimal carbon content, thereby enabling ease of delivery to an ion implant process and substantial reduction of carbon deposition during Al ion implantation. The source material is preferably stored and delivered from a sub-atmospheric storage and delivery device to enhance safety and reliability during the Al ion implantation process.