A MEMS IRIS DIAPHRAGM FOR AN OPTICAL SYSTEM AND METHOD FOR ADJUSTING A SIZE OF AN APERTURE THEREOF

摘要

A MEMS iris diaphragm (400) for an optical system is disclosed. The MEMS iris diaphragm (400) comprises at least two layers of diaphragm structures with each layer having suspended blade members (404a, 404b, 404c, 404d, 406a, 406b, 406c, 406d) angularly spaced from each other, the at least two layers of blade members (404a, 404b, 404c, 404d, 406a, 406b, 406c, 406d) arranged to overlap and cooperate with each other to define an aperture (408) to allow light to pass through, and a rotary actuating device (401) arranged to rotate at least some of the blade members (404a, 404b, 404c, 404d, 406a, 406b, 406c, 406d) of the at least two layers about their respective axis in a non-contact manner to vary the aperture's size. A method of adjusting a size of an aperture of a MEMS iris diaphragm (400) for an optical system is also disclosed.