DRIFT AMOUNT CALCULATION DEVICE, DRIFT AMOUNT CALCULATION METHOD, AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a drift amount calculation device capable of calculating the drift amount accurately.SOLUTION: A drift amount calculation device 100 for calculating the drift amount between a first image and a second image includes a correlation function operating section 112 for determining the correlation function of the first image and second image, a maximum position searching section 114 for searching a maximum position taking a maximum from the correlation function, a maximum position determining section 116 for determining a maximum position corresponding to the drift amount, by comparing the intensity of each maximum position, at a plurality of maximum positions searched in the maximum position searching section 114, while weighting depending on the distance from the center of the correlation function, and a drift amount calculating section 118 for calculating the drift amount on the basis of the maximum position corresponding to the drift amount.