Combined process for the production of trisilylamine and polysilazane having a molar mass of up to 500 g / mol

摘要

The object of the present invention is a process for producing trisilylamine and polysilazane in the liquid phase by metering in excess of stoichiometry to monochlorosilane present in an inert solvent. Here, the reaction for generating trisilylamine and polysilazane proceeds. Subsequently, the TSA is separated from the mixed product in gaseous form. The resulting TSA is purified by filtration and distillation to obtain high or very high purity. The bottom mixed product is passed from the reactor to a filtration unit where solid ammonium chloride is separated to obtain a liquid mixture of polysilazane and solvent. This mixture is fed to further distillation to recover the solvent. Monochlorosilane reacts completely in the reactor by metering NH3 in a stoichiometric excess over monochlorosilane. Thereby, in the downstream apparatus member for purifying TSA, it is completely prevented that monochlorosilane reacts with a small amount of disilylamine formed to form solid ammonium chloride. The solution filtered after the reactor does not contain any solids accordingly. The distillation column used does not contain any solids or precipitates after the end of the distillation process.