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High efficiency precision machining for the polishing tool and its manufacturing method

机译:抛光工具的高效精密加工及其制造方法

摘要

PROBLEM TO BE SOLVED: To provide a polishing tool that can achieve high efficiency precision polishing that cannot be achieved by conventional polishing tools, by using crystals of large particles as abrasive grains, and that causes no falling of the abrasive grains.SOLUTION: A polishing tool is provided that includes a polishing part with a plurality of abrasion grains fixed thereto. In the polishing tool, respective abrasion grains are held by a holding frame with a front face disposed along a tool substrate face, having openings of sizes preventing fall of the abrasion grains and having at least same number as the number of the abrasion particles, and are confined in an abrasion grain containing space demarcated on a back face of the holding frame, parts of the respective abrasion grains are protruded from the openings, and the protruded parts have heights of limited ranges from a surface of the holding frame. A method for manufacturing the polishing tool is also provided.
机译:解决的问题:提供一种抛光工具,该抛光工具可以通过使用大颗粒的晶体作为磨粒来实现常规抛光工具无法实现的高效精密抛光,并且不会导致磨粒掉落。提供一种工具,该工具包括具有固定到其上的多个磨粒的抛光部件。在该抛光工具中,各个磨粒由保持框架保持,该保持框架的前表面沿着工具基板的表面布置,该磨粒具有尺寸防止磨粒掉落的尺寸的开口,并且其数量至少与磨粒的数量相同;以及这些磨粒被限制在限定在保持框架的背面上的磨粒容纳空间中,各个磨粒的一部分从开口突出,并且突出部分具有从保持框架的表面在有限范围内的高度。还提供了一种用于制造抛光工具的方法。

著录项

  • 公开/公告号JP5972032B2

    专利类型

  • 公开/公告日2016-08-17

    原文格式PDF

  • 申请/专利权人 新技術開発株式会社;

    申请/专利号JP20120104966

  • 发明设计人 石塚 博;

    申请日2012-05-01

  • 分类号B24D3/02;B24D3/00;B24B37/00;B24B53/12;H01L21/304;

  • 国家 JP

  • 入库时间 2022-08-21 14:44:52

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