Object extraction methods, methods an object exchange, object-holding device, the object exchange system, an exposure apparatus, a method of manufacturing a flat panel display, and device manufacturing method

摘要

PROBLEM TO BE SOLVED: To exchange a substrate on a substrate stage quickly.;SOLUTION: A substrate stage 20a carries a substrate P₁ from a substrate holder 30a in a manner that a pressure gas is jetted from the substrate holder 30a to float the substrate P₁ and the substrate P₁ is moved along a horizontal plane using a top surface (substrate mount surface) of the substrate holder 30a as a guide plate with the use of a substrate carry-out device 70a housed in the substrate holder 30a. Thus, the carry-out operation of the substrate P₁ can be started after the exposure process on the substrate P₁ ends and before the substrate stage 20a is positioned at a substrate exchange position for the exchange of the substrate P₁. During the carry-out operation of the substrate P₁, another substrate P₂ which is subjected to the exposure next, stands by above the substrate holder 30a. After the end of the carry-out operation of the substrate P₁, the substrate P₂ is conveyed to a plurality of substrate lift devices 46a of the substrate stage 20a.;COPYRIGHT: (C)2015,JPO&INPIT