Diffraction ring analysis method and diffraction ring analysis equipment

摘要

PROBLEM TO BE SOLVED: To provide a diffraction ring analysis method capable of analyzing a diffraction ring and improving accuracy even if the diffraction ring has a missing part.SOLUTION: A diffraction ring analysis method includes: irradiating a specific part of a measurement target with a beam exhibiting a diffraction property, and measuring a strain using a central angle α of a diffraction ring formed by a diffraction beam reflected by this specific part (S21, S22); performing Fourier transform on this measurement result (S23); and calculating at least either a stress or strain of the specific part from a result of this Fourier transform (S24).