Minute material strain measuring apparatus and method

摘要

It is possible to accurately measure the strain for tensile or compressive stress while being a non-contact manner with respect to micro-material. The measurement unit 150, a CCD camera 170 for detecting interference light formed by the reference light from the reference mirror 166D and the measurement light from the measurement target region 108, the first objective lens 166 and a reference mirror 166D, interference light In addition to measuring the three-dimensional shape of the measurement target region 108 from the position of the first objective lens 166 the contrast is maximized, and an image processing device for measuring the distance between reference points of the two based on the three-dimensional shape, and, when the generator 130 strain, with a load cell 146 for measuring the tensile stress, and a fine movement X stage 140 which generates the distortion, which caused the fine material 102 strain, and the tensile stress which is measured, based on the distance between reference points of the two changes in strain, strain to the tensile stress is measured.