Active species generating unit and the active species generation device using the same

摘要

PROBLEM TO BE SOLVED: To achieve both increase in an amount of a generated active species and reduction in size.SOLUTION: An active species generation unit 8 comprises: a frame body 22 obtained by providing a plurality of support pillars 31 to a plate member 32 whose central part is opened; a discharge electrode 17 configured by bonding a plate gold having a needle electrode 25 and a power supply connector 26; an insulation substrate 16 formed of ceramics, and to whose surface a semi-conductive material is applied, and that has a hole part 21 at the center; a counter electrode 23 that is a plate gold whose central part is opened and which has a power supply connector 19; and a plate fixing part 24 for laminating the counter electrode 23 and the insulation substrate 16, and sandwiching them with the frame body 22. A voltage is applied from a power supply part 20 to the discharge electrode 17 and the counter electrode 23 to generate an active species by corona discharge. A ring-like convex part 28 is provided around the central opening of a surface opposed to the discharge electrode 17 of the plate member 32 of the frame body 22. A reinforcement member 29 unified with the plate member 32 is provided between adjacent support pillars 31 of the frame body 22.