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Alignment of single-mode polymer waveguide (PWG) array and silicon waveguide (SIWG) array of providing adiabatic coupling
Alignment of single-mode polymer waveguide (PWG) array and silicon waveguide (SIWG) array of providing adiabatic coupling
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机译:提供绝热耦合的单模聚合物波导(PWG)阵列和硅波导(SIWG)阵列的对准
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摘要
A method for fabricating, and a structure embodying, a single-mode polymer wave guide array aligned with a polymer waveguide array through adiabatic coupling. The present invention provides a structure having a combination of (i) a stub fabricated on a polymer and (ii) a groove fabricated on a silicon (Si) chip, with which an adiabatic coupling can be realized by aligning (a) a (single-mode) polymer waveguide (PWG) array fabricated on the polymer with (b) a silicon waveguide (SiWG) array fabricated on the silicon chip; wherein, the stub fabricated on the polymer is patterned according to a nano-imprint process, along with the PWG array, in a direction in which the PWG array is fabricated, and the groove fabricated on the silicon chip is fabricated along a direction in which the SiWG array is fabricated.
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