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Memory gate landing pad made from dummy features
Memory gate landing pad made from dummy features
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机译:记忆门登陆垫由虚拟特征制成
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摘要
Embodiments described herein generally relate to landing gate pads for contacts and manufacturing methods therefor. A bridge is formed between two features to allow a contact to be disposed, at least partially, on the bridge. Landing the contact on the bridge avoids additional manufacturing steps to create a target for a contact.
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