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Method for assembling an imaging x-ray optic.

机译:组装成像x射线光学器件的方法。

摘要

Method for assembling an imaging x-ray optic utilizing wedged mirror plates in a Wolter-I configuration wherein the difference in wedge between two stacked plate pairs is 2 wedge units. The wedged mirror plates are manufactured by using commercial high-quality silicon wafers which are diced, structured, wedged, coated, bent and stacked. Two of such stacks are then assembled into a confocal configuration to form a mirror module, which is a complete x-ray imaging system. Hundreds of such mirror modules are finally integrated and mounted to form an x-ray optic.
机译:在Wolter-I配置中使用楔形镜板组装成像X射线光学器件的方法,其中两个堆叠的板对之间的楔形差为2个楔形单元。楔形镜板是使用商业高质量的硅晶片制造的,该晶片被切块,结构化,楔形,涂覆,弯曲和堆叠。然后将两个这样的堆叠组装成共焦配置以形成反射镜模块,该反射镜模块是完整的X射线成像系统。最终将数百个此类反射镜模块集成并安装以形成X射线光学镜。

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