SYSTEM AND METHODS OF PHASE DIVERSITY WAVEFRONT SENSING

摘要

A phase diversity wavefront sensor includes an optical system including atleast one optical element for receiving alight beam; a diffractive optical element having a diffractive patterndefining a filter function, the diffractive optical element beingarranged to produce, in conjunction with the optical system, images from thelight beam associated with at least two diffractionorders; and a detector for detecting the images and outputting image datacorresponding to the detected images. In one embodiment,the optical system, diffractive optical element, and detector are arranged toprovide telecentric, pupil plane images of the light beam.A processor receives the image data from the detector, and executes aGerchberg- Saxton phase retrieval algorithm to measure thewavefront of the light beam.