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A FLEXURE-BASED MONOLITHIC PARALLEL STAGE FOR TWO AXES DRIVEN BY DIFFERENTIAL FORCES
A FLEXURE-BASED MONOLITHIC PARALLEL STAGE FOR TWO AXES DRIVEN BY DIFFERENTIAL FORCES
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机译:微分力驱动的两个轴的基于挠曲的单相并行阶段
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摘要
The present invention relates to a flexure-based monolithic parallel stage for two axes driven by differential forces. Piezoelectric drive parts, which are driven by a piezoelectric actuator, are arranged on four surfaces of a moving part, and each of the piezoelectric drive part is coupled and connected to a base through elastic hinges, thereby allowing the starting point of the moving part to be in the center and allowing the moving part to move in two axial directions (X, Y directions) by differential forces, which are the gravitational difference between the piezoelectric drive parts.
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