HYDROGENATION TREATMENT METHOD, HYDROGENATION TREATMENT APPARATUS, AND HYDROGENATION TREATMENT RECORDING MEDIUM

摘要

The present invention provides a hydrogenation treatment method, a hydrogenation treatment apparatus, and a recording medium, capable of stably and fully assigning a hydrogenation degree expected in accordance with a heat treatment temperature of a substrate to the substrate. The hydrogenation treatment method is for hydrogenation of a surface of the substrate. To this end, the hydrogenation treatment method includes the following processes: (A) supplying a process gas for hydrogenation on the surface of the substrate; (B) exposing the surface of the substrate to an atmosphere including the process gas over a preset period of time; and (C) heating the substrate under the existence of the process gas after the process (B).;COPYRIGHT KIPO 2016