MANUFACTURING METHOD OF SUBSTRATE GRAPHENE GROWTH AND SUBSTRATE GRAPHENE GROWTH AND MANUFACTURING DEVICE

摘要

It provides a kind of manufacture graphene to grow on the method for substrate, includes the following steps: that (one) prepares metal layer on substrate; (2) etching gas and conduction electrons cyclotron resonance plasma enhancing chemical vapour deposition technique (ECR-CVD) of carbonaceous gas are provided; (3) supply etching gas is used for when supply carbonaceous gas is to grow graphene metal layer; D grows graphene in substrate, without metal layer by continuously removing the metal layer of all metals by simultaneously continuously carrying out ECR-CVD steps c in etching process. ;The 2016 of copyright KIPO submissions