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MEMS ANCHOR AND SPACER STRUCTURE

机译:MEMS锚和间距结构

摘要

The display device includes a first substrate, a plurality of micro electro-mechanical system (MEMS) light modulators formed of a structural material coupled to the first substrate; And a second substrate isolated from the first substrate. The plurality of spacers extend from the first substrate to maintain a minimum distance away from the plurality of optical modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer, and a layer of structural material encapsulating the second polymer layer. The spacers may be used as fluid barriers and are configured to surround more than all but one of the MEMS light modulators in the display device.
机译:所述显示装置包括:第一基板;多个微机电系统(MEMS)光调制器,其由耦合到所述第一基板的结构材料形成;以及与第一基板隔离的第二基板。多个间隔物从第一基板延伸以保持与多个光学调制器的最小距离。间隔物包括具有与第一基板接触的表面的第一聚合物层,包封第一聚合物层的第二聚合物层以及包封第二聚合物层的结构材料层。隔离物可以用作流体屏障,并且被配置为围绕显示装置中除一个以上的MEMS光调制器以外的所有周围。

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