P2 P3 Method for Manufacturing Thin Film Solar Cell Implementing P2 Patterning and P3 Patterning at One Step and Apparatus Used Therefor

摘要

The present invention relates to a method of manufacturing a thin film solar cell and an apparatus used therefor. In the method of manufacturing a thin film solar cell, a light absorbing layer, a buffer layer, and a transparent electrode layer are deposited on a back electrode layer which is deposited on a substrate and has a P1 patterning part. After that, a P2 patterning part and a P3 patterning part are simultaneously formed by laser irradiation. So, manufacturing defects can be reduced.