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Diffraction phase microscope system and Method for simultaneous measurement of refractive index and thickness using the same

机译:衍射相显微镜系统和使用该系统同时测量折射率和厚度的方法

摘要

A diffraction phase microscope system according to an embodiment of the present invention includes a light source irradiating unit for mixing and irradiating light of at least two laser light sources having different wavelengths; A holder for holding the sample and irradiating light of the light source irradiating unit; A common path part for diffracting and interfering with light passing through the sample of the cradle; An image pickup section for picking up optical information passed through the common path section as an image; And an operation control unit connected to the image sensing unit. The measurement method using the diffraction phase microscope system according to the embodiment of the present invention eliminates the phase wrapping problem due to the difference in incidence angle of the laser light and easily and accurately determines the thickness and the refractive index of the sample through one image It can be measured at the same time.
机译:根据本发明实施例的衍射相显微镜系统包括:光源照射单元,用于混合和照射至少两个具有不同波长的激光源的光;以及用于保持样品并照射光源照射单元的光的保持器;用于衍射和干扰穿过通讯座样品的光的公共路径部分;图像拾取部分,用于拾取通过公共路径部分的光学信息作为图像;并且操作控制单元连接到图像感测单元。使用根据本发明的实施例的衍射相显微镜系统的测量方法消除了由于激光的入射角的差异而引起的相位包裹问题,并且容易且准确地通过一个图像确定样品的厚度和折射率。可以同时测量。

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