METHOD FOR PRODUCING CARBON NANOTUBE ARRAY SPINNING SOURCE MEMBER AND STRUCTURE PROVIDED WITH CARBON NANOTUBES

摘要

As a means for enhancing the productivity of the CNT array manufactured by the gas phase catalytic process and a means for enhancing the dispersibility of the CNT array, a base surface, which is a surface made of a material containing silicon oxide, is provided as at least a part of its surface A step of growing a plurality of carbon nanotubes on a base surface of the substrate by causing a raw gas and a vapor phase catalyst to exist in an atmosphere containing the vapor phase catalyst; And a second step of obtaining a carbon nanotube array made of the plurality of carbon nanotubes on the base surface. The present invention also provides a method of manufacturing a carbon nanotube array.