SYSTEM FOR TREATING NON-BIODEGRADABLE HAZARDOUS WASTE GAS GENERATED IN EMISSION PROCESSES FOR SEMICONDUCTORS AND VOLATILE ORGANIC COMPOUNDS

摘要

The present invention relates to a system for treating non-biodegradable hazardous waste gas, and more particularly to a system for treating non-biodegradable hazardous waste gas generated in emission processes for semiconductors and Volatile Organic Compounds (VOCs), which includes a direct combustion facility, a catalyst combustion facility, a thermal storage combustion facility, and a thermal storage catalyst combustion facility, and which selectively drives the facilities based on the volume and concentration of introduced waste gas. According to the present invention, the system for treating non-biodegradable hazardous waste gas comprises a direct combustion facility, a catalyst combustion facility, a thermal storage combustion facility, and a thermal storage catalyst combustion facility, and selectively drives the facilities based on the volume and concentration of introduced waste gas, thereby treating waste gas by using a single piece of equipment regardless of volume and concentration of waste gas. Furthermore, the system according to the present invention allows a component, such as a burner or the like, which can be used in common in the combustion facilities, to be shared, thereby reducing manufacturing and operating costs. Furthermore, in the system according to the present invention, the facilities are manufactured in rectangular shapes rather than circular shapes, and also thermal storage components are configured in rectangular shapes, and thus an empty space is absent between the thermal storage components, thereby improving efficiency. Moreover, the thermal storage components, thermal insulation components, and the like can be more conveniently installed than conventional ones because the facilities are manufactured in rectangular shapes.;COPYRIGHT KIPO 2016