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Apparatus and method for special microscopic examining a sample

机译:用于特殊显微检查样品的设备和方法

摘要

The invention relates to a device and a method for examining a specimen with, in particular with a scanning. The device comprises a probe microscope device, which a sample pickup portion for receiving a sample to be examined, a measuring probe and a displacement support, which is configured, for a probe microscopic examination of the sample the sample holder and the measuring probe to move relative to one another, and a condenser illumination as well as a of the condenser illumination downstream optical system, which is configured from the condenser illumination in a condenser light path condenser light generates discharged under at least partial maintaining of the condenser light parameters, with which the condenser light generates from the condenser illumination is emitted, in the region of the sample pickup portion for an optical microscopy of the sample to be examined imaging.
机译:用于检查样本的设备和方法技术领域本发明涉及一种用于检查样本的设备和方法,特别是通过扫描。该装置包括探针显微镜装置,该探针显微镜装置的样品拾取部分用于接收待检查的样品;测量探针;以及位移支撑件,该位移支撑件构造成用于对样品进行探针显微镜检查,样品保持器和测量探针运动相对于彼此,以及由聚光器以及下游聚光器系统构成的聚光器照明装置,该聚光器照明装置在聚光器光路中由聚光器照明构成,聚光器在至少部分地保持聚光器光参数的情况下产生放电。由聚光器照明产生的聚光器光在样本拾取部分的区域中发射出来,以便对要检查的样本成像进行光学显微镜检查。

著录项

  • 公开/公告号DE112007001927B4

    专利类型

  • 公开/公告日2016-07-07

    原文格式PDF

  • 申请/专利权人 JPK INSTRUMENTS AG;

    申请/专利号DE20071101927T

  • 发明设计人 JÖRN KAMPS;GUNNAR SOMMER;

    申请日2007-08-20

  • 分类号G02B21/00;G02B21/08;G01Q30/02;

  • 国家 DE

  • 入库时间 2022-08-21 14:10:20

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