Mg MATERIAL FORMING MATERIAL, Mg MATERIAL FORMING METHOD, AND NOVEL COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide an Mg complex of liquid which can be distilled, for the formation of a high quality Mg material (for example a film).SOLUTION: The present invention provides bis(N,N'-diisopropylpropionamidinate) magnesium. The compound is a novel compound, is liquid at 25°C, and makes it possible to give a high purity product by simple distillation operation. By chemical vapor deposition (CVD method) or atomic layer epitaxy (ALD method) using the same, a high-purity Mg film (for example, Mg film, MgO film, Mg3 N2 film, MgB2 film or the like) can be formed.SELECTED DRAWING: None