Integrated reciprocal space mapping for simultaneous lattice constant refinement using a two-dimensional X-ray detector

摘要

Using a two-dimensional detector (114) that integrates X-ray diffraction signals while changing the position of the sample (112) relative to the X-ray source (102) along a scanning direction such as a rocking scan curve, A method for performing an X-ray diffraction analysis of (112). The resulting image is compressed along the scan direction but is collected very quickly. Capturing both on-axis and off-axis reflections within a single image provides a common spatial reference system for comparing reflections. This is used in the construction of a reciprocal lattice spatial map and is useful for analyzing samples having multiple crystal layers, such as a crystal substrate on which a crystalline thin film is deposited.