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Confocal optical inspection apparatus and confocal optical inspection method

机译:共焦光学检查设备和共焦光学检查方法

摘要

PROBLEM TO BE SOLVED: To provide a confocal optical inspection device capable of acquiring information on an object with higher precision while taking distortion of an optical transmission line into consideration.SOLUTION: A confocal optical inspection device inspects an object by acquiring a confocal image of the object, and includes: a light source which emits illumination light; a first opening member which has a plurality of openings for making the illumination light emitted from the light source into a plurality of pieces of illumination light; an imaging part which acquires an image as respective pieces of illumination light reflected by the object form the image; and an information processing part which acquires a corrected confocal image by removing optical transmission distortion of the confocal optical inspection device from a TDI image obtained through a TDI operation of the imaging part by using a PSF representing previously measured optical characteristics of the confocal optical inspection device.
机译:解决的问题:提供一种共焦光学检查设备,其能够在考虑到光传输线的变形的同时,以更高的精度获取关于物体的信息。解决方案:一种共焦光学检查设备通过获取物体的共焦图像来检查物体。一种物体,包括:发射照明光的光源;以及第一开口构件,其具有多个开口,用于将从光源发出的照明光转换为多个照明光。成像部分,其获取图像作为由对象反射的各个照明光形成图像;信息处理部分,其通过使用表示共焦光学检查设备的先前测量的光学特性的PSF,从通过成像部分的TDI操作获得的TDI图像中去除共焦光学检查设备的光学透射畸变,从而获取校正后的共焦图像。 。

著录项

  • 公开/公告号JP6131448B2

    专利类型

  • 公开/公告日2017-05-24

    原文格式PDF

  • 申请/专利权人 三星電子株式会社;

    申请/专利号JP20120265692

  • 发明设计人 富樫 光宏;上山 真司;沼田 光徳;

    申请日2012-12-04

  • 分类号G02B21/06;G02B21/36;G01B11/24;G01B11/30;H04N5/232;H04N5/225;

  • 国家 JP

  • 入库时间 2022-08-21 13:56:19

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