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DEVICE FOR GENERATING PLASMA, SYSTEM FOR GENERATING PLASMA AND METHOD FOR GENERATING PLASMA
DEVICE FOR GENERATING PLASMA, SYSTEM FOR GENERATING PLASMA AND METHOD FOR GENERATING PLASMA
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机译:用于产生等离子体的装置,用于产生等离子体的系统以及用于产生等离子体的方法
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摘要
A device for generating plasma (1) comprises a high voltage electrode (10) as well as at least one external electrode (11, 12), wherein the high voltage electrode (10) at least in one coordinate direction (34) is arranged between conductive material of at least one external electrode (11, 12). The high voltage electrode (10) is covered with a dielectric (21) at least one side facing an external electrode (11, 12). Between the respective external electrode (11, 12) and the high voltage electrode (10) over its longitudinal extension at least one spacer element (20) is present, which at least in the region of its arrangement electrically insulates the respective external electrode (11,12) from the high voltage electrode (10) and which positions the respective external electrode (11, 12) at a constant distance from the high voltage electrode (10), wherein the spacer element is a gas-permeable foil.
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