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Terahertz Modulator Based on Low-dimension Electron Plasma Wave and Manufacturing Method thereof
Terahertz Modulator Based on Low-dimension Electron Plasma Wave and Manufacturing Method thereof
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机译:基于低维电子等离子波的太赫兹调制器及其制造方法
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摘要
A terahertz modulator based on low-dimension electron plasma wave, a manufacturing method thereof, and a high speed modulation method are provided. The terahertz modulator includes a plasmon and a cavity. The present disclosure discloses the resonance absorption mechanism caused by collective oscillation of electrons (plasma wave, namely, the plasmon). In order to enhance the coupling strength between the terahertz wave and the plasmon, a GaN/AlGaN high electron mobility transistor structure having a grating gate is integrated in a terahertz Fabry-Pérot cavity, and a plasmon polariton is formed arising from strong coupling of the plasmon and a cavity mode.
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