公开/公告号US2017052071A1
专利类型
公开/公告日2017-02-23
原文格式PDF
申请/专利权人 UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY);KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;
申请/专利号US201415306927
申请日2014-12-30
分类号G01J5/22;H01L29/24;H01L29/16;H05H1/46;H01L29/66;
国家 US
入库时间 2022-08-21 13:49:58