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Atomic layer deposition of metal phosphates and lithium silicates
Atomic layer deposition of metal phosphates and lithium silicates
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机译:金属磷酸盐和硅酸锂的原子层沉积
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摘要
The present application relates to atomic layer deposition (ALD) processes for producing metal phosphates such as titanium phosphate, aluminum phosphate and lithium phosphate, as well as to ALD processes for depositing lithium silicates.
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