首页>
外国专利>
Method for Processing Polysilicon Thin Film and Method for Fabricating Thin Film Transistor
Method for Processing Polysilicon Thin Film and Method for Fabricating Thin Film Transistor
展开▼
机译:多晶硅薄膜的加工方法和薄膜晶体管的制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method for processing a polysilicon thin film and a method for fabricating a thin film transistor are provided. The method for processing a polysilicon thin film includes: etching the polysilicon thin film using etching particles. An angle between an incident direction of the etching particles and the polysilicon thin film is larger than 0° and less than 90°.
展开▼