Atomic-scaled electronic spectrum information purification

摘要

Disclosed is a method for electronic residual spectroscopy for atomic-scaled surface and sub-surface information purification. The method comprises collecting at least one reference spectrum and a plurality of spectra under various conditions. The background of all the plurality of spectra is then subtracted and the plurality of spectra are normalized. Subtracting the reference spectrum from the normalized plurality of spectra will give atomic-scaled, meaningful information at selected zones.