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SOLAR CELL AND A METHOD FOR PRODUCING A SOLAR CELL WITH OXIDISED INTERMEDIATE REGIONS BETWEEN POLYSILICON CONTACTS
SOLAR CELL AND A METHOD FOR PRODUCING A SOLAR CELL WITH OXIDISED INTERMEDIATE REGIONS BETWEEN POLYSILICON CONTACTS
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机译:太阳能电池以及一种生产具有多晶硅触点之间的氧化中间区域的太阳能电池的方法
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摘要
The invention relates to a method for producing a solar cell (1), comprising the steps of: (a) providing a silicon substrate (3); (b) producing a boundary surface dielectric layer (5) on a surface of the silicon substrate (3); (c) depositing a silicon layer (7) consisting of amorphous or polycrystalline silicon onto said boundary surface dielectric layer (5), wherein the silicon layer (7) comprises laterally adjoining p-type doped regions (9) and n-type doped regions (11); (d) oxidising the silicon layer (7) in a locally delimited manner in intermediate regions (19) between adjoining p-type doped regions (9) and n-type doped regions (11); and (e) producing p-contacts (31) in contact with the p-type doped regions (9) of the silicon layer (7), and n-contacts (33) in contact with the n-type doped regions (11) of the silicon layer (7). Said locally-delimited oxidation allows the adjoining p-type doped regions (9) and n-type doped regions (11) to be electrically separated from one another, while simultaneously obtaining a good degree of passivation.
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