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HIGH-RESOLUTION CORRELATIVE LIGHT-ELECTRON MICROSCOPE

机译:高分辨率相关光电子显微镜

摘要

The present invention relates to a correlative light-electron microscope which has a light path disposed in the path of an electron beam, also has, disposed therein, yoke units provided with pole pieces, which are capable of controlling the generation position of a magnetic field, so as for a sample to be positioned in proximity to a magnetic lens part, thus does not lower the resolution of an electron microscope, and is capable of high-resolution microscopy. By using semi-in-lenses having various forms or disposing a light-reflecting mirror in the space between the pole pieces and thereby maintaining the distance between the magnetic lens and the sample, the present invention substantially does not increase the focal length of an electron microscope objective lens and thus has the effect of achieving high resolution for an electron microscope image.
机译:关联光电子显微镜技术领域本发明涉及一种关联光电子显微镜,该关联光电子显微镜的光路配置在电子束的路径上,并且在其内部配置有具有极片的轭铁单元,该轭铁单元能够控制磁场的产生位置。因此,将样品放置在靠近磁性透镜部分的位置,因此不会降低电子显微镜的分辨率,并且能够进行高分辨率显微镜检查。通过使用具有各种形式的半透镜或在极靴之间的空间中布置反光镜,从而保持磁透镜与样品之间的距离,本发明基本上不会增加​​电子的焦距。显微镜物镜,因此具有实现电子显微镜图像高分辨率的效果。

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