ETCHANT COMPOSITE OF Ti-Al-BASED ALLOY LAYER, AND METHOD OF FORMING METALLIC WIRING USING SAME

摘要

The present invention provides an etchant composite of a Ti-Al-based alloy layer and a method of forming metallic wires using the same. The present invention includes: (A) 1-10 wt% of a fluoride ammonium salt compound represented by the chemical formula 1 as below; (B) 1-10 wt% of organic acid including two or more carboxyl groups; (C) 0.01-3 wt% of inorganic ammonium sa and (D) remaining water. Thus, the present invention is able to effectively etch a Ti-Al-based alloy layer.;COPYRIGHT KIPO 2017