- Metal grid-Silver nanowire mixed transparent electrodes and the preparation method of metal grid using polymeric nanofiber mask

摘要

The present invention relates to a composite transparent electrode including a metal grid and a silver nanowire, and a method of manufacturing the same. The metal grid according to the present invention is manufactured without a photolithography process, and is characterized by using a polymer nanofiber grid printed in a grid shape as a metal etching mask. First, a metal thin film layer is deposited on a glass substrate or a plastic substrate using a physical deposition process such as sputtering, and polymer nanofibers are patterned in a grid pattern using an electrohydrodynamic dynamic (EHD) jet printing process. Then, after removing the metal thin film layer through the etching solution containing the metal salt, the polymer nanofiber mask is melted, and a metal grid is manufactured. The upper layer is further coated with nanowires if necessary to provide excellent electrical conduction characteristics while maintaining high transmittance. The present invention provides a novel manufacturing method of the transparent electrode using a EHD jet printing process without using a photomask, which can inexpensively and quickly manufacture the transparent electrode having a desired diameter and a gap between the grids.