Chromatic range sensor incorporating a dynamic intensity compensation function

摘要

A chromatic point sensor (CPS) system is provided which compensates for potential errors due to intensity ambiguities of input spectral profiles that occur when a CPS illumination source is driven using different power levels. The CPS system includes an optical pin that includes a confocal optical path that includes a chromatic-dispersive element and that is configured to focus different wavelengths at different distances near a workpiece surface to be measured, a source of illumination, and CPS electronics. The CPS electronics include: a lighting source control part configured to drive the lighting source using different power levels; a CPS wavelength detector comprising a plurality of pixels distributed along a measurement axis of the CPS wavelength detector to provide output spectral profile data; and a power level spectral compensation portion configured to compensate the output spectral profile data to eliminate or reduce potential errors due to intensity ambiguities of input spectral profiles that occur when the CPS illumination source is driven using the different power levels.