FORMATION METHOD OF CONDUCTIVE CARBON FILM, PRODUCTION METHOD OF CONDUCTIVE CARBON FILM-COATED MEMBER, AND PRODUCTION METHOD OF SEPARATOR FOR FUEL CELL

摘要

PROBLEM TO BE SOLVED: To provide a formation method of a conductive carbon film excellent in corrosion resistance, even in the case of a plasma treatment apparatus having a simple structure.SOLUTION: There is provided a formation method of a conductive carbon film for forming the conductive carbon film on a workpiece W by a DC plasma CVD method. In the formation method of the conductive carbon film, a direct-current pulse power source 4 is used as a power source for plasma production, and in a deposition step of the conductive carbon film, chain hydrocarbon gas having a carbon number of 4 or smaller is supplied as raw material gas, and the chain hydrocarbon gas is changed to plasma at a deposition temperature of 520-750°C.SELECTED DRAWING: Figure 1