Nozzle for material deposition source configuration dispensing assembly, material deposition source configuration, vacuum deposition system, and method for depositing material

摘要

A nozzle (100) coupled to a dispensing assembly for directing evaporated material from a material source into a vacuum chamber is described. The nozzle extends from the nozzle inlet (110) to the nozzle outlet (120) in a nozzle direction (110) that receives the evaporated material, a nozzle outlet (120) that releases the evaporated material to a vacuum chamber, and a flow direction (111). The nozzle passage (130) comprises an outlet section (131) having an opening angle (α) that continuously increases in the direction of flow (111). Further provided are a material deposition configuration having such a nozzle, a vacuum deposition system having a material deposition source configuration, and a method for depositing evaporated material. [Selection] Figure 1