MANUFACTURING METHOD OF LAMINATE WITH PROCESSED FILM, MANUFACTURING METHOD OF PROCESSED FILM AND PROCESSED FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a processed film capable of preparing the processed film by patterning various kinds of material of films and, in particular, capable of preparing the processed film by patterning the films regularly in high density, to provide the processed film which is made of various kinds of material and is patterned and, in particular, to provide a manufacturing method of a laminate containing the processed film prepared by patterning the films regularly in high density.;SOLUTION: A manufacturing method of a laminate with a processed film includes a step of preparing the laminate by laminating a substrate 18, an adhesive layer 16, a processing object film 14 and a mask layer 12 in the order. Therein, the processing object film 14 on such an etching object laminate 10 that an adhesive force of the side facing the substrate 18 on the adhesive layer 16 is larger than an adhesive force of the side facing the processing object film 14 on the adhesive layer 16 is subjected to reactive ion etching and is patterned.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT