SnO2-BASED GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an SnO2-based gas sensor with an increased sensitivity for hydrogen and CO.;SOLUTION: A part of the Sn atoms in the surface of SnO2 are replaced by Zr atoms or the oxygen defects of the surface of SnO2 particles are replaced by oxygen which combines with Zr atoms in the SnO2-based gas sensor, so that the ratio of the Zr atoms of the sum of the Zr atoms and the Sn atoms in the SnO2 is set to be in the range of 0.01at% to 0.2at%, both inclusive.;SELECTED DRAWING: Figure 4;COPYRIGHT: (C)2018,JPO&INPIT