Calibration system and calibration method for laser Doppler speed meter

摘要

PROBLEM TO BE SOLVED: To accurately calibrate a laser Doppler velocimeter.SOLUTION: A measurement region of a laser doppler velocimeter 100 to be calibrated is set on a surface of a surface plate 1. The surface plate 1 is moved on an X stage 2, and a laser length measuring machine 4 measures the displacement L of the surface plate 1 due to the movement. During of the movement of the surface plate 1, the cycle number of a beat signal occurring in a detection signal output from the laser doppler velocimeter 100 is counted. Then, the value obtained by dividing the displacement L by the counted cycle number is set as an interval between interference fringes formed in the measurement region by the laser Doppler velocimeter 100.SELECTED DRAWING: Figure 1