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Biomolecular structure analysis device and method of forming biomolecule structure analysis device
Biomolecular structure analysis device and method of forming biomolecule structure analysis device
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机译:生物分子结构分析装置及形成生物分子结构分析装置的方法
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摘要
The membrane of a conventional solid-state nanopore device, which is believed to be promising for understanding the structural characteristics of DNA and determining a nucleotide sequence, has been thick, and the accuracy in determining a nucleotide sequence in the DNA chain has been insufficient. A method characterized by forming a membrane by forming a first film on a first substrate having a surface of Si, then forming a hole in the first film in such a manner that the surface of the first substrate is exposed, then forming a second film on the first film and on the surface of the first substrate and then etching the first substrate with a solution which does not remove the second film.
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