Optical Vortex Coronagraph Scatterometer

摘要

An optical vortex coronagraph scatterometer including a light source of wavelength λ, a scattering cell in optical communication with the light source, a circular aperture having a radius R at a distance d from the scattering cell in optical communication with the light source, a pivot point between the circular aperture and the scattering cell allowing relative movement of the light source and the scattering cell with respect to the circular aperture, a first lens at a focal length f₁ between the circular aperture and an optical vortex element, and a second lens at a focal length f₂ between the optical vortex element and a detector; and method for determining a scattering spectra at low and zero angles is disclosed.