首页> 外国专利> THE SOLUTION OF CHEMICAL PLATINUM-RHODIUM ALLOY DEPOSITION AND THE METHOD OF CONTINUOUS PLATINUM-RHODIUM ALLOY COATING FORMATION

THE SOLUTION OF CHEMICAL PLATINUM-RHODIUM ALLOY DEPOSITION AND THE METHOD OF CONTINUOUS PLATINUM-RHODIUM ALLOY COATING FORMATION

机译:化学铂铑合金沉积的解决方法及连续铂铑合金镀层的形成方法

摘要

This invention relates to chemical (autocatalytic) metal alloys deposition solutions and processes, particularly chemical deposition of platinum-rhodium alloy. The invention may be applied for the deposition of platinum-rhodium coatings on dielectrics, semiconductors, or conductors of complex configurations. This invention aims to reduce the toxicity of chemical platinum-rhodium alloy deposition solution, increase the coating formation speed, simplify and cheapen the method of continuous platinum-rhodium coating formation. According to the invention chemical platinum-rhodium alloy deposition method comprises the surface sensitisation using SnCl2 solution, activation using PdCl2 solution and immersion in a bath with a chemical deposition solution comprising 0.003 to 0.03 M K2PtCl as a platinum (IV) ion source, 0.001 - 0.005M RhCl3 as a rhodium (III) ion source, 0.015 to 0.25 M diisopropanolamine (Dipa), 0.01 to 0.1 M N2H4 and concentrated acetic acid CH3COOH as pH adjuster to the mixture pH 11.5.
机译:本发明涉及化学(自催化)金属合金的沉积溶液和方法,特别是铂-铑合金的化学沉积。本发明可以用于在复杂构造的电介质,半导体或导体上沉积铂铑涂层。本发明的目的是减少化学铂铑合金沉积溶液的毒性,提高镀层的形成速度,简化连续镀铂铑镀层的方法,降低其成本。根据本发明,化学铂铑合金沉积方法包括使用SnCl2溶液进行表面敏化,使用PdCl2溶液进行活化以及将其浸入含有0.003至0.03 M K2PtCl作为铂(IV)离子源,0.001- 0.005M RhCl3作为铑(III)离子源,0.015至0.25 M二异丙醇胺(Dipa),0.01至0.1 M N2H4和浓乙酸CH3COOH作为pH调节剂至混合物pH 11.5。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号