PDMS PDMS POLYMER CANTILEVER STRUCTURE FOR IMPROVING RELIAVILITY OF PIEZORESISTIVE SENSOR

摘要

The present invention relates to a PDMS polymer cantilever structure integrated with a sensor capable of precisely measuring myocardial contractile force in real time and a method of manufacturing the PDMS polymer cantilever structure. We measured the voltage output through the whitestone bridge and measured the displacement of the cantilever using the laser displacement meter. In the PDMS polymer cantilever structure, a plurality of microgroove patterns capable of culturing myocardial cells in the longitudinal direction of the cantilever are formed on the upper surface of the cantilever formed at one end, and a metal piezoresistive sensor and a laser displacement detector reflector are formed therebelow. The cantilever having the micro groove pattern formed is chemically bonded to the body portion of the glass material having the metal electrode at the bottom by oxygen plasma treatment to form a PDMS polymer cantilever structure integrated with the sensor. The proposed process can solve various problems of existing PDMS cantilevers and is expected to be applicable to a wide range of fields other than cantilevers.