METHOD OF FABRICATING BROADBAND NEAR INFRARED PLASMONIC WAVEGUIDE

摘要

The present invention relates to a method for manufacturing a broadband near infrared plasmonic waveguide which can realize a technology capable of propagating a surface electric field signal having a relatively small scale while minimizing a signal loss. The method comprises the steps of: forming a first pattern on a substrate; depositing a metal thin film on the substrate on which the first pattern is formed; removing the first pattern from the substrate on which the metal thin film is deposited to allow only a second pattern to remain wherein the metal thin film is deposited on the substrate to form the second pattern; and forming metal nanoparticles by heating the substrate on which the second pattern is formed to generate a dewetting phenomenon.